Capacitance Diaphragm Gauge

The CMC series gauge is a compact and economical non-heating capacitance manometer featuring a robust full welded construction and Inconel diaphragm.
The electronics of this product is temperature compensated to minimize drift due to ambient temperature change.

Digital Capacitance Diaphragm Gauge

Capacitance diaphragm gauge (CDG) allows accurate measurement of vacuum pressure without being affected by gas type.
By combining Brooks’ proprietary sensor technology (Patented: US Patent No, 4823603) with digital temperature control and digital calibration, we realized it with further high accuracy and long term stability.

Quartz Parts

Quartz products used in semiconductor processes are required to have particularly strict specifications for quality. We deal with Wonik Quartz (Korea) quartz products are high quality, high precision products made at ISO 9002 certified factory.
We have various kinds of quartz.

Welded Metal Bellows

Welded metal bellows is used for vacuum holding of the moving parts in general vacuum equipment and Semiconductor manufacturing equipment and exhaust piping from equipment. Particularly, in order to maintain the vacuum of moving part of the equipment, welded metal bellows using high quality metal is required, taking safety, confidentiality and durability into consideration. Our welded metal bellows are managed, manufactured and inspected at ISO 9001 accredited factory and we offer high quality bellows which can be relieved.