Chamber Guard

Sorry, this entry is only available in Japanese.

Display & Power Supply Unit, MS-1S, MS-2S

Model MS-1S and Model MS-2S have two function of the display & power supply with set point relay for capacitance manometer (CDG) of Brooks. Users can be easy to measure a vacuum pressure value in the chamber if only to connect CDG with MS-1S or MS-2S to chamber. (see attached data sheets). It is the most suitable to measure a pressure value in the chamber for the R&D system and so on.