Vacuum Valve

This butterfly valve controls vacuum pressure by varying the valve plate angle from 0 to 90°.

We can provide high-speed response and high reproducibility vacuum control for various vacuum chambers (etching, CVD equipment, etc.).

Heated butterfly valves have a heater sandwiched between the flanges and also embedded in the valve plate.

This is Megatorr's proprietary technology.

It can handle temperatures up to 200°C, has excellent temperature uniformity, prevents deposition, and significantly improves maintainability and productivity.

By using it in conjunction with AP series controllers and capacitance manometers, it can be used in semiconductor and other processes.

High-speed response and highly reproducible vacuum control can be achieved.

As the processes for vacuum pressure control become more diverse, the pressure control range also becomes more diverse.

In particular, there is an increasing need for pressure control under low vacuum (high pressure).

Similarly, the diversification of process gases has led to higher demands on valve heating temperatures.

This angle valve was developed to meet those needs.

Wide pressure control range: Controllable from 101.33kPa (atmospheric pressure) to 10Pa or less (760Torr to 70mTorr or less).

It can be heated up to 200°C.

Equipped with a unique opening and closing mechanism that can be found nowhere else, it can optimize vacuum evacuation and gas flow.

This is a groundbreaking vacuum control valve.

Eliminates unevenness in the exhaust flow and in the amount and duration of exposure of the wafer surface to gas.

This can significantly improve uniformity.

The AP series includes an Absolute Vacuum Gauge (capacitance manometer), a butterfly valve, and

an absolute vacuum gauge (capacitance manometer) and a throttle valve.

You can choose from two control algorithms, PID or hybrid, and it reliably provides the high-speed response

and highly repeatability vacuum pressure control required for manufacturing equipment for semiconductors, FPDs, solar cells, etc.

Settings can also be made from the front panel, making operation extremely easy.

In addition, as it is CE marked and RoHS compliant, it is used in mass production facilities in a wide range of industries around the world.

The AP-110R is used as a downstream pressure control device to control the evacuation speed

by changing the valve conductance when evacuating the vacuum chamber of manufacturing equipment.