Vacuum check valve (chamber guard)
The chamber guard is attached to the top of the vacuum exhaust pump.
This unit shuts off the exhaust line in the event of an emergency stop of the exhaust pump.
By products and dust generated during film formation and etching processes may get into the chamber or exhaust system. The dust particles fly up from the piping and chamber, when the pump is stopped in an emergency.
This may cause contamination of the products inside the chamber.
By using the chamber guard, the exhaust system can be instantly shut off when the pump stops.
Prevents dust from flowing back and protects products from contamination.
Power Supply and Display unit for vacuum gauge
The MS-1S and MS-2S were developed specifically for use with Brooks Instruments capacitance manometers.
This is a display and power supply unit equipped with a setpoint relay.
It incorporates two or four independently operating setpoint relays, and the capacitance manometer
One or two can be connected.
When connecting a capacitance manometer with temperature status output,
This display can show the temperature status.
 | MS Series Data Sheet (271KB) |
Quartz Products
Quartz products used in semiconductor manufacturing processes are required to meet particularly strict specifications in terms of quality.
The quartz products we handle are manufactured by Wonik QnC (Korea),
This is a high-quality, high-precision product manufactured in an ISO9002 certified factory.
We offer a wide variety of high-quality quartz.
If you have any desired specifications, please feel free to contact us.
- Newly designed products
- OEM products from various equipment manufacturers
Outer tubes/inner tubes/boats/other parts
Parts for 150mm to 300mm devices
| Quartz Product Data Sheet (233KB) |
Cable Harness Production
We manufacture high-quality cable harnesses that meet customer specifications with short delivery times.
We also welcome requests for small lots and a wide variety of products. Please feel free to contact us.
If you do not have a harness drawing, we can create one for you.
All workers engaged in harness production are trained in soldering techniques and quality control.
We have acquired external certification and are producing stable, high-quality products.
| Cable Harness Production (702KB) |