Heater Products

Heater Block

Heater blocks are used to precisely control the temperature of wafers within semiconductor manufacturing equipment.
It has the ability to heat and retain heat.

Megatorr offers products with low particle count and excellent temperature uniformity.
This contributes to improving quality and productivity, as well as reducing costs.

If you have any desired specifications, please feel free to contact us.
  • New design and manufacturing
  • Equivalent to existing equipment
 Parts for 150mm to 200mm devices
Megatorr Corporation
〒231-0024
4F, 2-14 Yoshihamacho, Naka-ku, Yokohama, Kanagawa

TEL: +81 45-222-0035
FAX: +81 45-222-0016

■【Our products】
Vacuum Valve
・Angle Valve
・Butterfly Valve
・Pendulum type gate valve
・Aperture Valve
・Pressure Controller
Welded Metal Bellows
Various Heater-related Equipment
Vacuum check valve (chamber guard)
Foreline Trap (Filter)
Cable Harness Production
 [Brooks Instrument Products]
Absolute Vacuum Gauge (Capacitance Manometer)
 [WonikQnC Products]
Manufacturing and sales of quartz components
Back to TOP